Sunday, August 4, 2019

JEOL: Release of a New Schottky Field Emission(FE) Scanning Electron Microscope JSM-F100

― The next level of analytical intelligence in FE-SEM for combining high resolution and operability ―

TOKYO-Sunday 4 August 2019 [ AETOS Wire ]

(BUSINESS WIRE) -- JEOL Ltd. (TOKYO:6951) ( (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100 in August 2019.


Scanning electron microscopes(SEMs) are used in various fields; nanotechnology, metals, semiconductors, ceramics, medicine, and biology. With application expansion, SEM users are in need of fast high-quality data acquisition and simple compositional information confirmation with seamless operation.

The JSM-F100 incorporates our highly regarded In-lens Schottky Plus FE electron gun and "Neo Engine"(electron optical control system) as well as a new GUI "SEM Center" and an innovative "LIVE-AI(Live Image Visual Enhancer-Artificial Intelligence) filter". This enables an optimal combination of high-spatial-resolution imaging and operability. Furthermore, a standard JEOL energy dispersive X-ray spectrometer(EDS) is fully integrated within "SEM Center" for seamless acquisition from images to elemental analysis results. The JSM-F100 achieves superb work efficiency, 50% or higher than that of our previous JSM-7000 series, realizing dramatically-increased high throughput.


In-lens Schottky Plus FE electron gun
Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current at low accelerating voltage supports various capabilities from high-resolution imaging to high-speed elemental mapping.
Hybrid Lens(HL)
The Hybrid Lens(HL), combining the electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens.
Neo Engine(New Electron Optical Engine)
Neo Engine, a cutting-edge electron optical control system, significantly improves the precision of automatic functions and operability.
New function of "SEM Center"
A new operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis and provides next-generation operability and high-resolution images obtained with FE-SEM.
New "Zeromag" function
"Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.
New LIVE-AI filter*
Utilizing the AI(artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment.

Resolution(1 kV)

1.3 nm

Resolution(20 kV)

0.9 nm

Accelerating voltage

0.01 to 30 kV

Standard detectors

Upper Electron Detector(UED), Secondary Electron Detector(SED)

Electron gun

In-lens Schottky Plus FE electron gun

Probe current

A few pA to 300 nA(30 kV)
A few pA to 100 nA(5 kV)

Objective lens

Hybrid Lens(HL)

Specimen stage

Full eucentric goniometer stage

Specimen movement

X: 70 mm, Y: 50 mm, Z: 2 to 41 mm
Tilt: –5 to 70°, Rotation: 360°

EDS detector

Energy resolution: 133 eV or less
Detectable elements: B(boron) to U(uranium)
Detection area: 60 mm2

Annual unit sales target

60 units/year

3-1-2, Musashino, Akishima, Tokyo, 196-8558, Japan
Izumi Oi, President & COO
(Stock code:6951, Tokyo Stock Exchange First Section)

Photos/Multimedia Gallery Available:

Science and Measurement Instruments Sales Division
Kazunori Kitazumi

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